Silicon as a microfluidic material for imaging and incubation of droplets

Nicolas Lobato-Dauzier (1, 2) , Robin Deteix (1, 2) , Guillaume Gines (3) , Alexandre Baccouche (1, 2) , Benediktus Nixon Hapsianto (4) , Shu Okumura (1, 2) , Guilhem Mariette (1, 2) , Djaffar Belharet (5) , Samuel Queste (5) , Laurent Jalabert (1, 2) , Matthieu Denoual (6) , Yannick Rondelez (3) , Hiroshi Toshiyoshi (1, 2) , Hiroyuki Fujita (7) , Soo Hyeon Kim (1, 2) , Teruo Fujii (1, 2) , Anthony J Genot (1, 2)

1 LIMMS - Laboratory for Integrated Micro Mechatronics Systems
2 IIS - Institute of Industrial Science
3 Gulliver (UMR 7083)
4 UTokyo - The University of Tokyo
5 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
6 GREYC - Groupe de Recherche en Informatique, Image et Instrumentation de Caen
7 Tokyo City University

N.L.D. designed the chambers, fabricated them and tested them. R.D built and tested the thermal control platform. N.L.D. & RD performed experiments, and analyzed the data. G.G performed the digital assay and analyzed the data. A.B provided support on the biochemical reactions and advice on initial chamber designs. B.N.H. and S.O tested the chamber and gave feedback to improve it. G.M. worked on the chamber sealing to reach high temperatures. S.Q. and D.B. scaled and characterized the process to 6 inch wafers. M.D. assisted with the design of the thermal control platform. L.J, S.H.K, H.F, Y.R. and H.T provided advice for the design and fabrication. T.F and A.J.G supervised the research.

Keywords: Droplet microfluidics; droplet imaging; Silicon chamber; enzymology

Domains: Engineering Sciences [physics]; Life Sciences [q-bio]

Nicolas Lobato-Dauzier, Robin Deteix, Guillaume Gines, Alexandre Baccouche, Benediktus Nixon Hapsianto, et al.. Silicon as a microfluidic material for imaging and incubation of droplets. 2022. ⟨hal-03855453⟩